Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2019 / 07 Vol. 37; Iss. 4
Maskless random antireflective nanotexturing of single crystal SiC
Voss, Lars F., Frye, Clint D., Bora, Mihail, Hall, David L., Grivickas, Paulius V., Conway, Adam M.Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5108513
Date:
July, 2019
File:
PDF, 1.34 MB
english, 2019