Preparation of Zr-N Thin Film Resistors Using Reactive Evaporation Apparatus
SATUKA, Akito, MORI, Fumichika, NARITA, Masayosi, MORI, Kintaro, MIZUTANI, MichioVolume:
14
Year:
1971
Journal:
SHINKU
DOI:
10.3131/jvsj.14.325
File:
PDF, 1.45 MB
1971