ALD HfO 2 films for defining...

ACS Applied Materials & Interfaces 2019 / 06

ALD HfO 2 films for defining microelectrodes for electrochemical sensing and other applications

Chia, Charmaine, Shulaker, Max M., Provine, John, Jeffrey, Stefanie S., Howe, Roger T.
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Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.9b06891
Date:
June, 2019
File:
PDF, 1.69 MB
english, 2019
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