Development of MEMS Capacitive Sensor Using a MOSFET...

IEEJ Transactions on Sensors and Micromachines 2008 Vol. 128; Iss. 3

Development of MEMS Capacitive Sensor Using a MOSFET Structure

Izumi, Hayato, Matsumoto, Yohei, Aoyagi, Seiji, Harada, Yusaku, Shingubara, Shoso, Sasaki, Minoru, Hane, Kazuhiro, Tokunaga, Hiroshi
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Volume:
128
Year:
2008
Language:
english
Journal:
IEEJ Transactions on Sensors and Micromachines
DOI:
10.1541/ieejsmas.128.102
File:
PDF, 1.87 MB
english, 2008
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