Progress and perspectives in dry processes for nanoscale...

Japanese Journal of Applied Physics 2019 / 06 Vol. 58; Iss. SE

Progress and perspectives in dry processes for nanoscale feature fabrication: fine pattern transfer and high-aspect-ratio feature formation

Iwase, Taku, Kamaji, Yoshito, Kang, Song Yun, Koga, Kazunori, Kuboi, Nobuyuki, Nakamura, Moritaka, Negishi, Nobuyuki, Nozaki, Tomohiro, Nunomura, Shota, Ogawa, Daisuke, Omura, Mitsuhiro, Shimizu, Tets
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Volume:
58
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab1638
Date:
June, 2019
File:
PDF, 3.52 MB
2019
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