Low-Temperature Deposition of Inorganic-Organic HfO2-PMMA Hybrid Gate Dielectric Layers for High Mobility ZnO Thin-film Transistors
Mullapudi, Gouri Syamala Rao, Velazquez-Nevarez, Gonzalo Alonso, Avila-Avendano, Carlos, Torres-Ochoa, Jorge Alejandro, Quevedo-López, Manuel A., Ramírez Bon, RafaelJournal:
ACS Applied Electronic Materials
DOI:
10.1021/acsaelm.9b00175
Date:
May, 2019
File:
PDF, 1.43 MB
2019
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