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Electrically-functionalised nanoindenter dedicated to local capacitive measurements: Experimental set-up and data-processing procedure for quantitative analysis
Comby-Dassonneville, Solène, Volpi, Fabien, Verdier, MarcVolume:
294
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2019.05.032
Date:
August, 2019
File:
PDF, 1.44 MB
english, 2019