Indium incorporation in homoepitaxial β-Ga 2 O 3 thin films grown by metal organic vapor phase epitaxy
Bin Anooz, S., Popp, A., Grüneberg, R., Wouters, C., Schewski, R., Schmidbauer, M., Albrecht, M., Fiedler, A., Ramsteiner, M., Klimm, D., Irmscher, K., Galazka, Z., Wagner, G.Volume:
125
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5090213
Date:
May, 2019
File:
PDF, 3.88 MB
2019