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Study on Fine Boring of Single Crystalline Silicon by EDM.
UNO, Yoshiyuki, KUBOTA, Shin-ichiro, YOKOMIZO, Seiichi, OKADA, Akira, TANAKA, HidetoVolume:
30
Year:
1996
Journal:
Journal of The Japan Society of Electrical Machining Engineers
DOI:
10.2526/jseme.30.65_9
File:
PDF, 8.19 MB
1996