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Microelectronic Engineering 2019 / 6

Deep learning denoising of SEM images towards noise-reduced LER measurements

Giannatou, E., Papavieros, G., Constantoudis, V., Papageorgiou, H., Gogolides, E.
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Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2019.111051
Date:
June, 2019
File:
PDF, 1.23 MB
english, 2019
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