Metallic coatings for MEMS structures
Korlyakov, A V, Mikhailova, O N, Serkov, A VVolume:
387
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/387/1/012040
Date:
July, 2018
File:
PDF, 602 KB
english, 2018