![](/img/cover-not-exists.png)
Microstructure and Mechanical Property Investigation of TaSiN Thin Films Deposited by Reactive Magnetron Sputtering
Zaman, Anna, Shen, Yi, Meletis, Efstathios I.Volume:
9
Journal:
Coatings
DOI:
10.3390/coatings9050338
Date:
May, 2019
File:
PDF, 4.48 MB
2019