Accelerated ICP etching of 6H-SiC by femtosecond laser...

Applied Surface Science 2019 / 09 Vol. 488

Accelerated ICP etching of 6H-SiC by femtosecond laser modification

Huang, Yigang, Tang, Fei, Guo, Zheng, Wang, Xiaohao
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Volume:
488
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2019.05.262
Date:
September, 2019
File:
PDF, 3.58 MB
2019
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