Peculiarity of Electric Properties of Oxygen Implanted...

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physica status solidi (a) 2019 / 06

Peculiarity of Electric Properties of Oxygen Implanted Silicon at Early Precipitation Stages

Danilov, Denis, Vyvenko, Oleg, Loshachenko, Anton, Sobolev, Nikolay
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Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201900327
Date:
June, 2019
File:
PDF, 991 KB
english, 2019
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