Optimizing reactive ion etching to remove sub-surface polishing damage on diamond
Hicks, Marie-Laure, Pakpour-Tabrizi, Alexander C., Zuerbig, Verena, Kirste, Lutz, Nebel, Christoph, Jackman, Richard B.Volume:
125
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5094751
Date:
June, 2019
File:
PDF, 1.43 MB
english, 2019