Mechanical Properties of Thin AlSiN Films, Studied by...

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques 2019 / 5 Vol. 13; Iss. 3

Mechanical Properties of Thin AlSiN Films, Studied by Nanoindentation, as a Thermal-Stability Criterion

Kuznetsova, T. A., Zubar, T. I., Lapitskaya, V. A., Sudzilovskaya, K. A., Chizhik, S. A., Uglov, V. V., Shymanski, V. I., Kvasov, N. T.
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Volume:
13
Language:
english
Journal:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S102745101903011X
Date:
May, 2019
File:
PDF, 615 KB
english, 2019
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