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Heat Flux into the Substrate and Electric Power Measurement in Radio Frequency Discharge Plasma
Hachiya, Ken-ichiro, Ebe, Kentaro, Kato, Syouji, Mukaigawa, Seiji, Takaki, Koichi, Fujiwara, TamiyaVolume:
125
Year:
2005
Journal:
IEEJ Transactions on Fundamentals and Materials
DOI:
10.1541/ieejfms.125.223
File:
PDF, 5.16 MB
2005