Heterogeneous Integration of Metal Oxides—Towards a CMOS...

Proceedings (American Bar Association. Section of International and Comparative Law) 2019 / 06 Vol. 14; Iss. 1

Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device

Köck, Anton, Deluca, Marco, Sosada-Ludwikowska, Florentyna, Maier, Günther, Teubenbacher, Robert Wimmer, Sagmeister, Martin, Rohracher, Karl, Wachmann, Ewald, Niehaus, Jan Steffen, Becker, Sören, Tokm
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Volume:
14
Language:
english
Journal:
Proceedings
DOI:
10.3390/proceedings2019014005
Date:
June, 2019
File:
PDF, 345 KB
english, 2019
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