Low Cost and High‐Aspect Ratio Micro/Nano Device...

Advanced Engineering Materials 2019 / 07

Low Cost and High‐Aspect Ratio Micro/Nano Device Fabrication by Using Innovative Metal‐Assisted Chemical Etching Method

Van Toan, Nguyen, Wang, Xiaoyue, Inomata, Naoki, Toda, Masaya, Voiculescu, Ioana, Ono, Takahito
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Language:
english
Journal:
Advanced Engineering Materials
DOI:
10.1002/adem.201900490
Date:
July, 2019
File:
PDF, 1.98 MB
english, 2019
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