Effects of sputtering power and annealing temperature on surface roughness of gold films for high-reflectivity synchrotron radiation mirrors
Chen, Jia-Qi, Huang, Qiu-Shi, Qi, Run-Ze, Feng, Yu-Fei, Feng, Jiang-Tao, Zhang, Zhong, Li, Wen-Bin, Wang, Zhan-ShanVolume:
30
Journal:
Nuclear Science and Techniques
DOI:
10.1007/s41365-019-0635-x
Date:
July, 2019
File:
PDF, 1.41 MB
2019