Titanium Nitride Film on Titanium Film by Magnetron...

Key Engineering Materials 2018 / 10 Vol. 782

Titanium Nitride Film on Titanium Film by Magnetron Sputtering Method

Watazu, Akira, Teraoka, Kay, Sonoda, Tsutomu
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Volume:
782
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.782.176
Date:
October, 2018
File:
PDF, 1.22 MB
english, 2018
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