Spectroscopic Analyses of Sputtered Aluminum Oxide Films with Oxygen Plasma Treatments
Hom-On, Chatpawee, Horprathum, Mati, Eiamchai, Pitak, Limwichean, Sakson, Patthanasetakul, Viyapol, Chananonnawathorn, Chanunthorn, Lertvanithphol, Tossaporn, Songsiriritthigul, Prayoon, Nakajima, HidVolume:
947
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.947.96
Date:
March, 2019
File:
PDF, 663 KB
2019