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Hot Filament CVD Growth of 4H-SiC Epitaxial Layers
van Zeghbroeck, Bart, Robinson, Hannah, Brow, Ryan R.Volume:
924
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.924.120
Date:
June, 2018
File:
PDF, 2.35 MB
2018