Design and applications of MEMS flow sensors: A review

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Sensors and Actuators A: Physical 2019 / 6

Design and applications of MEMS flow sensors: A review

Ejeian, Fatemeh, Azadi, Shohreh, Razmjou, Amir, Orooji, Yasin, Kottapalli, Ajay, Warkiani, Majid Ebrahimi, Asadnia, Mohsen
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Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2019.06.020
Date:
June, 2019
File:
PDF, 2.47 MB
2019
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