Modeling and experimental evaluations of a four-legged...

Mechanical Systems and Signal Processing 2019 / 10 Vol. 132

Modeling and experimental evaluations of a four-legged stepper rotary precision piezoelectric stage

Deng, Jie, Chen, Weishan, Wang, Yun, Zhang, Shijing, Liu, Yingxiang
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Volume:
132
Language:
english
Journal:
Mechanical Systems and Signal Processing
DOI:
10.1016/j.ymssp.2019.06.026
Date:
October, 2019
File:
PDF, 2.37 MB
english, 2019
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