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Design, Fabrication, and Characterization of Bimorph Micromachined Harvester With Asymmetrical PZT Films
Dong, Xiaoxue, Yi, Zhiran, Kong, Lingchao, Tian, Yingwei, Liu, Jingquan, Yang, BinYear:
2019
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2019.2920213
File:
PDF, 2.17 MB
english, 2019