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Ultra-smooth and hydrophobic nitrogen-incorporated ultranano-crystalline diamond film growth in C-H-O-N gas phase system via microwave plasma CVD
Zheng, Yuting, Liu, Jinlong, Wei, Junjun, Chen, Liangxian, Li, Zhengcheng, Hao, Hui, Li, Fangsen, Ye, Haitao, Li, ChengmingVolume:
374
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2019.06.017
Date:
September, 2019
File:
PDF, 1.79 MB
2019