Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition
Safonov, A. I., Sulyaeva, V. S., Bogoslovtseva, A. L., Timoshenko, N. I.Volume:
59
Journal:
Journal of Applied Mechanics and Technical Physics
DOI:
10.1134/S0021894418050103
Date:
September, 2018
File:
PDF, 227 KB
2018