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[IEEE 2018 IEEE 20th Electronics Packaging Technology Conference (EPTC) - Singapore, Singapore (2018.12.4-2018.12.7)] 2018 IEEE 20th Electronics Packaging Technology Conference (EPTC) - Characterization of Plasma Enhanced Chemical Vapor Deposition of Amorphous Silicon Films from 100°C to 400°C
Lee Hou Jang, StevenYear:
2018
DOI:
10.1109/EPTC.2018.8654352
File:
PDF, 398 KB
2018