[IEEE 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Naples, FL, USA (2019.4.1-2019.4.5)] 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - An Improved Fabrication Process for Micro Hemispherical Resonator Gyroscope
Shi, Yan, Xi, Xiang, Li, Wei, Wu, Yulie, Wu, Xuezhong, Lu, Kun, Wang, Zhenjun, Xiao, DingbangYear:
2019
Language:
english
DOI:
10.1109/ISISS.2019.8739642
File:
PDF, 1.71 MB
english, 2019