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Characterization of Etching Processes on CU Surfaces
Nakakura, C. Y., Phanse, V. M., Zheng, G., Altman, E. I.Volume:
451
Year:
1996
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-451-81
File:
PDF, 1.72 MB
english, 1996