Characterization of Etching Processes on CU Surfaces

MRS Proceedings 1996 Vol. 451

Nakakura, C. Y., Phanse, V. M., Zheng, G., Altman, E. I.

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Volume:

451

Year:

1996

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/PROC-451-81

File:

PDF, 1.72 MB

english, 1996

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