Etch Damages of Ovonic Threshold Switch (OTS) Material by...

ECS Journal of Solid State Science and Technology 2019 Vol. 8; Iss. 6

Etch Damages of Ovonic Threshold Switch (OTS) Material by Halogen Gas Based-Inductively Coupled Plasmas

Park, Jin Woo, Kim, Doo San, Lee, Won Oh, Kim, Ju Eun, Choi, HyeJin, Kwon, OIk, Chung, SeungPil, Yeom, Geun Young
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Volume:
8
Year:
2019
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0051906jss
File:
PDF, 940 KB
english, 2019
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