Automated discrimination of surface imperfections and...

tm - Technisches Messen 2019 / 07 Vol. 86; Iss. 7-8

Automated discrimination of surface imperfections and adhered particles on customer-specific optical elements

Schöch, Alexander, Perez, Patric, Linz-Dittrich, Sabine, Bach, Carlo, Ziolek, Carsten
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Volume:
86
Language:
english
Journal:
tm - Technisches Messen
DOI:
10.1515/teme-2019-0023
Date:
July, 2019
File:
PDF, 944 KB
english, 2019
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