A MEMS Micro-g Capacitive Accelerometer Based on...

Micromachines 2019 / 06 Vol. 10; Iss. 6

A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process

Rao, Kang, Wei, Xiaoli, Zhang, Shaolin, Zhang, Mengqi, Hu, Chenyuan, Liu, Huafeng, Tu, Liang-Cheng
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Volume:
10
Journal:
Micromachines
DOI:
10.3390/mi10060380
Date:
June, 2019
File:
PDF, 8.38 MB
2019
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