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Effects of process parameters on chemical-mechanical interactions during sapphire polishing
Xu, Wenhu, Cheng, Yuanyao, Zhong, MinVolume:
216
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2019.111029
Date:
August, 2019
File:
PDF, 2.87 MB
english, 2019