Observation and mitigation of RF-plasma-induced damage to...

Journal of Applied Physics 2019 / 07 Vol. 126; Iss. 1

Observation and mitigation of RF-plasma-induced damage to III-nitrides grown by molecular beam epitaxy

Clinton, Evan A., Vadiee, Ehsan, Tellekamp, M. Brooks, Doolittle, W. Alan
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Volume:
126
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5097557
Date:
July, 2019
File:
PDF, 3.63 MB
english, 2019
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