Realization of p-type gallium nitride by magnesium ion...

Scientific Reports 2019 / 12 Vol. 9; Iss. 1

Realization of p-type gallium nitride by magnesium ion implantation for vertical power devices

Shi, Ya-Ting, Ren, Fang-Fang, Xu, Wei-Zong, Chen, Xuanhu, Ye, Jiandong, Li, Li, Zhou, Dong, Zhang, Rong, Zheng, Youdou, Tan, Hark Hoe, Jagadish, Chennupati, Lu, Hai
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Volume:
9
Journal:
Scientific Reports
DOI:
10.1038/s41598-019-45177-0
Date:
December, 2019
File:
PDF, 3.01 MB
2019
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