Technique of surface control with the Electrolyzed...

MRS Proceedings 2000 Vol. 612

Technique of surface control with the Electrolyzed D.I.water for post CMP cleaning

Shirakashi, Mitsuhiko, Itoh, Kenya, Katakabe, Ichiro, Kamezawa, Masayuki, Kihara, Sachiko, Tsujimura, Manabu, Saitoh, Takayuki, Yamada, Kaoru, Miyashita, Naoto, Kodera, Masako, Matsui, Yoshitaka
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Volume:
612
Year:
2000
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-612-D11.2.1
File:
PDF, 435 KB
english, 2000
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