Gettering Mechanism of Copper in N-type Silicon Wafers
Ozaki, Rie, Torigoe, Kazuhisa, Mizuno, Taisuke, Yamamoto, KazuhiroJournal:
physica status solidi (a)
DOI:
10.1002/pssa.201900220
Date:
June, 2019
File:
PDF, 1.34 MB
2019