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Embedded carbon bridges in low- k PECVD silicon carbonitride films using silazane precursors
Chang, Wei-Yuan, Chen, Wei-Zhong, Lee, Hung-Tse, Leu, JihperngVolume:
58
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab1fd5
Date:
July, 2019
File:
PDF, 667 KB
english, 2019