Fabrication of ultrathin poly-crystalline SiGe-on-insulator...

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Journal of Physics Communications 2019 / 07

Fabrication of ultrathin poly-crystalline SiGe-on-insulator layer for thermoelectric applications

Goyal, Chandra Prakash, Muthusamy, Omprakash, M, Navaneethan, Takeuchi, Tsunehiro, Shimura, Yosuke, Shimomura, Masaru, Ponnusamy, S, Hayakawa, Yasuhiro, Ikeda, Hiroya
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Language:
english
Journal:
Journal of Physics Communications
DOI:
10.1088/2399-6528/ab302f
Date:
July, 2019
File:
PDF, 1.41 MB
english, 2019
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