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Design and Analysis of a Novel Piezo-Actuated XYθ z Micropositioning Mechanism with Large Travel and Kinematic Decoupling
Xiao, Ruijiang, Shao, Shubao, Xu, Minglong, Jing, ZijianVolume:
2019
Language:
english
Journal:
Advances in Materials Science and Engineering
DOI:
10.1155/2019/5461725
Date:
July, 2019
File:
PDF, 5.20 MB
english, 2019