High Resolution Surface Metrology Using...

physica status solidi (a) 2019 / 07 Vol. 216; Iss. 13

High Resolution Surface Metrology Using Microsphere‐Assisted Interference Microscopy (Phys. Status Solidi A 13∕2019)

Montgomery, Paul C., Lecler, Sylvain, Leong‐Hoï, Audrey, Perrin, Stéphane
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Volume:
216
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201970044
Date:
July, 2019
File:
PDF, 441 KB
2019
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