![](/img/cover-not-exists.png)
Kinetic Monte Carlo simulation of the Growth of AlN films by MOCVD
An, Jiadai, Dai, Xianying, Wu, Wujian, Guo, Runqiu, Feng, LanshengLanguage:
english
Journal:
physica status solidi (b)
DOI:
10.1002/pssb.201900114
Date:
July, 2019
File:
PDF, 921 KB
english, 2019