Electron transport mechanism through ultrathin Al2O3 films...

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Semiconductor Science and Technology 2019 / 07

Electron transport mechanism through ultrathin Al2O3 films grown at low temperatures using atomic–layer deposition

Ma, Pengfei, Guo, Wenhao, Sun, Jiamin, Gao, Jiacheng, Zhang, Guanqun, Xin, Qian, Li, Yuxiang, Song, Aimin
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Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/ab315d
Date:
July, 2019
File:
PDF, 1.58 MB
english, 2019
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