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Surface energy engineering for LiTaO 3 and α-quartz SiO 2 for low temperature (
Baker, Brian, Herbots, Nicole, Whaley, Shawn D., Sahal, Mohammed, Kintz, Jacob, Yano, Aliya, Narayan, Saaketh, Brimhall, Alex L., Lee, Wey-Lyn, Akabane, Yuko, Culbertson, Robert J.Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5095157
Date:
July, 2019
File:
PDF, 4.26 MB
english, 2019