Plasma corrosion resistance of aluminosilicate glasses containing Ca, Y and B under fluorocarbon plasma with Ar+
Choi, Jae Ho, Na, Hyein, Park, Jewon, Kim, Hyeong-JunVolume:
521
Journal:
Journal of Non-Crystalline Solids
DOI:
10.1016/j.jnoncrysol.2019.119498
Date:
October, 2019
File:
PDF, 1.56 MB
2019