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A Monolithic Integration Bio-inspired Three-Dimensional MEMS Vector Hydrophone
Song, Jinlong, Wang, Renxin, Zhang, Guojun, Shang, Zhenzhen, Zhang, Lansheng, Zhang, WendongYear:
2019
Journal:
IEEE Access
DOI:
10.1109/ACCESS.2019.2924990
File:
PDF, 1.12 MB
2019