Reprint of “Effect of target composition on the microstructural, mechanical, and corrosion properties of TiAlN thin films deposited by high-power impulse magnetron sputtering”
Chang, Chi-Lung, Yang, Fu-ChiLanguage:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2019.07.008
Date:
July, 2019
File:
PDF, 2.60 MB
english, 2019