Surface morphology evolution of a polycrystalline diamond by inductively coupled plasma reactive ion etching (ICP-RIE)
Zheng, Yuting, Ye, Haitao, Liu, Jinlong, Wei, Junjun, Chen, Liangxian, Li, ChengmingVolume:
253
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2019.06.079
Date:
October, 2019
File:
PDF, 2.75 MB
2019